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Toward 28Si through Trichlorosilane1
Toward 28Si through Trichlorosilane1
2002
A.P. Babichev
Z. Ya. Zhernova
A. V. Kurochkin
A. A. Mishachev
G. E. Popov
A.I. Rudnev
A. V. Tikhomirov
Keywords:
Inorganic chemistry
Centrifugation
Isotope separation
Trichlorosilane
Chemistry
Centrifuge
semiconductor technology
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