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Piezoelectric peristaltic micropump

2015 
A piezoelectric peristaltic micropump comprises a matrix and a piezoelectric executor; the matrix is provided with two fluid channels, one of which serves as a start point of a conveying route and the other of which serves as an end point of the conveying route; the piezoelectric executor mainly consists of a piezoelectric layer, an upper electrode, a lower electrode and an elastic layer; the lower electrode fully covers the piezoelectric layer, the upper electrode, the piezoelectric layer, the lower electrode and the elastic layer are arranged from top to bottom in sequence, an outer frame part of the elastic layer and the base are sealed and fixed, the region in the outer frame part of the elastic layer is a pump cavity part, and the upper electrode, the lower electrode and piezoelectric layer are positioned in the region of the pump cavity part. The upper electrode consists of multiple separation electrode modules equidistantly arrayed along the conveying route. The piezoelectric peristaltic micropump has the advantages that the structure is simple and fluid can bidirectionally flow.
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