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Warpage Reduction of Thick 4H-SiC Epitaxial Layers on the Substrates
Warpage Reduction of Thick 4H-SiC Epitaxial Layers on the Substrates
2018
K. Masumoto
S. Segawa
T. Ohno
S. Tsukimoto
Kazutoshi Kojima
T Kato
H Okumura
Keywords:
Optoelectronics
Epitaxy
Materials science
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