Preparation and Characterization of Hydroxyapatite-Coated Titanium Biomedical Implant Materials by Ion Beam Sputter Deposition

Ar+ ion beam sputter deposition was used to produce thin hydroxyapatite (HA) coating on polished titanium substrate.In this study,the HA ceramic target was sputtered by an argon-ion beam with an energy of 0.9keV,1.2keV and 1.5keV,respectively.X-ray diffraction (XRD),scanning electron microscopy (SEM),transmission electron microscopy (TEM),and Fourier transform infrared (FTIR) spectroscopy were used to characterize the as-sputtered coatings.XRD analysis and TEM observation revealed that the as-sputtered coating was amorphous.No distinct hydroxyl band was observed in the typical FTIR transmission spectra,and new absorption bands were determined for CO3,which was brought about during the deposition process.SEM observation results indicated that the as-sputtered coatings were uniform and dense.Preliminary scratch measurements suggested a strongly bonded HA coating on the titanium substrate.It was concluded form this study that ion beam deposition technique could be used to produce thin calcium phosphat