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Laser Scattering Diagnostics of Molecular and Electron Properties of H_2/CH_4 Microwave Discharge Plasma
Laser Scattering Diagnostics of Molecular and Electron Properties of H_2/CH_4 Microwave Discharge Plasma
2002
masasi narisige
kiitirou naiya
katunori muraoka
tadanori sakoda
Soushi Narishige
Kiichiro Uchino
Katsunori Muraoka
Tadanori Sakoda
Keywords:
Electron temperature
Molecular Density
Plasma
Atomic physics
Electron
Scattering
Ion source
Microwave
Chemistry
Electron density
Molecular physics
laser scattering
Correction
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