The surface passivation on the optical and surface properties of InP

We propose a novel surface passivation of InP, to obtain the strong luminescence property and completely remove the surface state. InP is passivated by (NH4)2S solution, then treated by rapid thermal annealing(RTA) at different temperatures. Compared with unannealing sample, the PL intensity is increased to 1.7 times. We adopt atomic layer deposition (ALD) of Al2O3 avoiding oxidizing gradually. (2014) Trans Tech Publications, Switzerland.