Study of Cr-Si Electrodes on Langasite Surface Acoustic Wave Resonators for High Temperature Sensing

Many piezoelectric materials are viewed as potential candidates for high temperature SAW applications, including langasite (LGS) and AlN. Only a few metals or alloys can withstand such temperatures, among them platinum and iridium based alloys or nanocomposites. These materials cannot be considered when high quality factors are required, due to their higher resistivity and density. The (Cr, V)-Si system was previously studied, but has never been proposed as a solution for SAW electrodes, in spite of its high thermal stability, lower density (about 6 g/cm 3) and decent resistivity. This study focuses on the development of Cr5 Si3 alloy deposition for its use in LGS-based resonators, aiming at wireless applications.