An Ultra-High-Quality Factor Silicon Disk Resonator

A disk resonator demonstrates an ultra-high-quality factor (Q ~ 107) at room temperature. When embedded in a board-level feedback oscillator an excellent short-term stability (340 ppt @ 1s integration time) is measured. The use of a new higher-order bulk mode in the disk in combination with the anchor alignment with the nodal locations enables minimization of anchor losses, boosting the resonator quality factor.