Development of focused-ion-beam (FIB) machining systems for fabricating 3-D micro- and nano- structures

This study has developed a three-dimensional (3D) focused-ion-beam (FIB) etching system and a method for machining 3D sensor structures. The FIB etching equipment enables precision cuts to be made with great flexibility for micro- and nano-structure on thin films and single crystals. Hence, the FIB etching system offers a variety of new applications in the area of imaging and precision micro-machining.