Computer Simulation of the Processes of Mixing in Multilayer Nitride Coatings with Nanometer Period

Using the complex of methods for the structural state attestation in combination with the computer simulation and measurement of mechanical properties (hardness), the influence of the period Λ on the mixing process on the interlayer boundaries of multilayer coatings TiN/ZrN, CrN/ZrN and MoN/ZrN is studied. The coatings were obtained by the vacuum arc method on the upgraded “Bulat-6” installation. By means of the computer simulation method the depth of impact was estimated, which for the systems under investigation is about 2 and 3.5 nm, respectively. It is established that for the period Λ = 20 nm the highest hardness is 44 GPa. At Λ less than 20 nm, the hardness decreases, this can be related to the formation of a solid solution in the border regions due to the radiation-stimulated mixing. Computer simulation results obtained in the work allow to define the regimes for the optimal structural state. This is the basis of the direction of the structural engineering of nonequilibrium systems.