Test Structures for Accurate UHF C-V Measurements of Nano-Scale CMOSFETs with HfSiON and TiN Metal Gate

Even when a width of a frame region is narrowed, expansion and movement of impurity ions into a display region and peeling off of a seal material are prevented or suppressed. A substrate includes a first frame region positioned outside a display region, a second frame region positioned outside the first frame region, and a third frame region positioned outside the second frame region. The substrate includes a first electrode in the first frame region, a second electrode in the second frame region, and a third electrode in the third frame region. A first potential is applied to the first electrode, a second potential larger in an absolute value than the first potential is applied to the second electrode, and a third potential different from the second potential is applied to the third electrode.