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Solid Catalysts Based on Fenton Reaction for SiC Wafer in Chemical Mechanical Polishing
Solid Catalysts Based on Fenton Reaction for SiC Wafer in Chemical Mechanical Polishing
2017
Shaoping Xu
Keywords:
Control engineering
Engineering
Chemical-mechanical planarization
Catalysis
Wafer
Composite material
Chemical engineering
fenton reaction
Correction
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