Solid-state image pickup apparatus and a method for manufacturing a solid-state image pickup apparatus for

The present invention relates to a solid-state image pickup apparatus and a method for manufacturing the solid-state image pickup device. A method for manufacturing a solid-state image pickup device, the solid-state image pickup apparatus comprising: a substrate comprising a photoelectric conversion portion; and a waveguide corresponding to the photoelectric conversion portion are disposed on a substrate and comprising a core portion and coating layer, the method comprising: a first step and a second step, wherein, in a first step and the second step, a plasma enhanced chemical vapor deposition by high-density, is formed in the coating layer to be formed as an opening under the condition of the core member, and, after the first step, in a second step, the ratio of RF power and the RF power on the front side of the substrate back surface side of the substrate is higher than the first step of this ratio, plasma enhanced chemical vapor deposition by high-density, to be formed is formed as a core member.