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Thin-film growth of N-doped Ga 2 (O 1− x S x ) 3 by using pulsed-laser deposition
Thin-film growth of N-doped Ga 2 (O 1− x S x ) 3 by using pulsed-laser deposition
2021
Takumi Saito
Yuta Ihara
Takuto Soma
Motohisa Kado
Akira Ohtomo
Keywords:
Thin film
Pulsed laser deposition
Optoelectronics
Materials science
Doping
Gallium oxide
Correction
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