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VB-6 N-channel MOSFETS fabricated in silicon-on-oxide using a scanning E-beam line source
VB-6 N-channel MOSFETS fabricated in silicon-on-oxide using a scanning E-beam line source
1983
John Y. Chen
D.B. Rensch
Keywords:
Oxide
Line source
Electronic engineering
Analytical chemistry
Silicon
Physics
Communication channel
Electron beam processing
Optoelectronics
n channel
Correction
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