Navigation grade MEMS accelerometer

This paper reports on a high performance navigation grade MEMS servo accelerometer targeted at inertial applications. Reported results are for a bulk MEMS capacitive sensor with 11g full scale over a 300 Hz bandwidth interfaced with a highly optimized servo-loop 5 th -order sigma-delta electronic. Measurements demonstrate a long-term bias stability of +/−0.2mg, a second order non-linearity K2 ≪5 µg/g 2 , an in-band noise floor of 1 µg/√Hz and a Dynamic Range over 1 Hz bandwidth of 22 bits.