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Top-down fabrication of GaN nano-laser arrays by displacement Talbot lithography and selective area sublimation
Top-down fabrication of GaN nano-laser arrays by displacement Talbot lithography and selective area sublimation
2019
B. Damilano
Pierre-Marie Coulon
S. Vézian
Virginie Brändli
Jean Yves Duboz
J. Massies
Philip A. Shields
Keywords:
Optics
Chemistry
Fabrication
Optoelectronics
Sublimation (phase transition)
Laser
Lithography
Nano-
Nanolaser
Nanowire
Correction
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