Wavefront measurement method of lateral shear interferometer
2013
The invention provides a wavefront measurement method of a lateral shear interferometer, and aims at providing a real-time, high-accuracy and rapid method for wavefront distortion measurement of the lateral shear interferometer. The method adopts the following technical scheme that the method comprises the steps that a filtering function set by experience is set as an adaptive algorithm module obtained after automatic analysis and acquisition result computation in lateral shear interferometer measurement software; the adaptive algorithm module makes small-angle inclination and leads in appropriate space carrier frequency by a beam splitter in an interference system; frequency spectrum information and digital weighted filtering are obtained by fourier analysis after imaging system acquisition; light intensity fringe information obtained by a charge coupled device (CCD) is subjected to fourier change and analysis; new frequency spectrum information is obtained; a parameter of the filtering function is automatically computed according to acquired pattern information; a wavefront chart is obtained by filtering, computation and reduction; phase information obtained by filtering is subjected to upwrapping computation and superposition computation; and a final wavefront phase measurement result is obtained.
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