[Y(dbm) 3 (H 2 O)]: Synthesis, thermal behavior and spin-coating precursor for Y 2 O 3 layer formation

Abstract The synthesis, structure and thermal behavior of [Y(dbm) 3 (H 2 O)] ( 3 ) (dbm = 1,3-diphenyl-1,3-propandionate) and its use as a spin-coating precursor for Y 2 O 3 deposition is reported. Complex 3 was prepared by the reaction of [Y(NO 3 ) 3 ·6H 2 O] ( 1 ) with 3 equiv of Hdbm ( 2 ) in presence of NaOH. The molecular structure of 3 in the solid-state was determined by single X-ray crystal diffraction. Both C 1 symmetric crystallographically independent species of 3 possess a YO 7 coordination setup with minor deviation from an ideal capped octahedron coordination geometry ( Λ enantiomer). Complex 3 forms a 1D chain, due to intermolecular hydrogen bonds between the coordinated H 2 O molecule and the O atom of the dbm ligand, respectively. The thermal decomposition behavior of 3 was investigated by thermogravimetric studies in the temperature range of 40–800 °C and 40–1300 °C under an oxygen and argon atmosphere, respectively. Powder X-ray diffraction (PXRD) measurements of the residues confirmed the formation of Y 2 O 3 . Complex 3 was applied as a spin-coating precursor for yttrium oxide film formation on either Si wafers with a continuous 100 nm thick SiO 2 film, or with a native oxide layer. The as-deposited Y 2 O 3 layers are smooth, conformal, dense and transparent and are of a thickness of 27 and 30 nm, respectively.