Monocrystalline InP surfaces normally sputtered with Ar+: SEM and TEM observations

Abstract We report new findings on surface structures produced on monocrystalline InP after 3 keV normally incident Ar + bombardment. As confirmed by transmission electron microscopy, In crystallites are observed to grow preferably in the peripheral region of the bombarded area and give rise to densely populated nanometric size “granules”. The peripheral region of the sputtered area exhibits a ring shape halo of white contrast in the SEM image. On the other hand, the central region of the bombarded spot was characterized by sporadically produced cones. At those cone tips, the growth of small In particles was definitely observed, suggesting the enhanced surface migration of In atoms at the cone tips. Such a promoted surface diffusion of In atoms was believed to be driven by the surface temperature rise during ion bombardment.