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Characterization of Surface Preparation for Epitaxial SiGe Process using X-ray Reflectivity
Characterization of Surface Preparation for Epitaxial SiGe Process using X-ray Reflectivity
2007
Dileep Agnihotri
Charlie Cj Lee
Hsin Tai
Arthur Chen
Mike Ma
Steven Baxter
Jesús Gallegos
Shrikant Kalegaonkar
Keywords:
X-ray reflectivity
Epitaxy
Analytical chemistry
Ceramic materials
Materials science
surface preparation
Optoelectronics
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