A round robin experiment of elemental sensitivity factors in low-energy ion scattering

In a round robin experiment a set of five polycrystalline, metallic samples is studied by low-energy ion scattering (LEIS) in five different laboratories, The energy range is 0.6-3.5 keV and He and Ne ions are used. Even though different experimental setups are used the evaluated elemental sensitivity factors agree within +/-20%. Reproducibility within single laboratories is better than 10%. In an additional study carried out in three laboratories the surface composition of an alloy, Cu55Pd45, was determined, using in situ calibration standards, These surface composition measurements agreed within +/-3 at% demonstrating that quantitative composition determination is possible using this procedure. (C) 1998 Elsevier Science B.V. All rights reserved.