Quantitative Analysis of the Micro Friction of Single Crystal Silicon

The single-asperity friction of polished single crystal silicon using a cone with a spherical apex tip was quantitatively studied concerning the influence of normal load and scratching cycles. Specific friction equations were presented and the interfacial friction equations were determined by fitting the experiment data obtained in the scratching tests. The influence of different scratch conditions to both the interfacial fiction and the plowing friction was analyzed. This paper aims to understand the mechanisms of friction and material removal of single crystal silicon in micro and nanocutting or polishing.