2차원 평면상에서 주파수 추출을 위한 2-축 가속도 센서 Simulation

This paper is on the modeling of two-axis accelerometer and extraction of their frequency characteristics which is applied surface micro machining for measuring the frequency at two-dimensional plane. In this paper, MEMS which is a field of two-axis accelerometer semiconductor sensors using surface micro machining technology is applied. The proposed accelerometer basic structure is based on the comb driver and movable mass at the two-dimensional plane. The Two-axis accelerometer is adopted as an auto focus system operation of digital camera and application component are implemented by using gyroscope of aviation systems.