Silicon: the Semiconductor Material
2004
Fifty years of silicon for semiconductor device applications is the milestone at which this series of articles has been written, which will present the many-faceted development of all the technologies that are connected with it, their present status, and recognizable future trends. The individual articles will cover topics such as:
growth of single crystals and its reproducibility in industrial applications
polycrystalline and amorphous silicon
epitaxial technologies and thin films
crystal defects, impurities, and doping
various processes for micro- and nano-structuring
materials requirements from the vantage point of the users in the fields of microelectronics, power electronics, optoelectronics, and micromechanics
interfaces to other materials such as III-V compounds, as well as the whole area of bioelectronics.
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