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Silicon: the Semiconductor Material

2004 
Fifty years of silicon for semiconductor device applications is the milestone at which this series of articles has been written, which will present the many-faceted development of all the technologies that are connected with it, their present status, and recognizable future trends. The individual articles will cover topics such as: growth of single crystals and its reproducibility in industrial applications polycrystalline and amorphous silicon epitaxial technologies and thin films crystal defects, impurities, and doping various processes for micro- and nano-structuring materials requirements from the vantage point of the users in the fields of microelectronics, power electronics, optoelectronics, and micromechanics interfaces to other materials such as III-V compounds, as well as the whole area of bioelectronics.
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