Apparatus for forming a metal oxide film, process for forming a metal oxide and metal oxide

A film formation apparatus (100) according to an embodiment of this invention comprises a first solution tank (5A), a second solution tank (5B), a reaction chamber (1), a first line (L1) and a second line (L2). The first solution tank (5A) includes a source solution 10 comprising metal. The second solution tank (5B) contains hydrogen peroxide. A substrate (2) is arranged in the reaction chamber (1), and the reaction chamber (1) comprises a heating unit (3) that heats the substrate. The first line (L1) performs a source solution (10) from the first solution tank (5A) to the reaction chamber (1). The second line (L2) leads from the second hydrogen peroxide solution container (5B) to the reaction chamber (1).