Preparation and Research on Microwave Plasma Chemical Vapor Deposition Diamond Films on SiC Substrate

Diamond films and diamond/graphite composite films have excellent wear resistance, it can be used as the protective coating to effectively improve the parts life and performance. The micro crystalline diamond films, nanocrystalline diamond films and diamond/graphite composite films were prepared on sic substrate by microwave plasma chemical vapor deposition on different power, pressure and CH4 concentration growth parameters. The films surface characteristics were research by SEM and Raman spectrometer. The results indicate that the diamond grain size and content decreased and graphite content increased with CH4 concentration increasing on constant microwave power and cavity pressure; the diamond grain size decreased and graphite constant increased with cavity pressure increasing on constant microwave power and CH4 concentration.