Effect of plasma surface pre-treatment on plastic substrate for ZnO TFT

Controlling the surface morphologies of ZnO nanostructures is a critical issue for the fabrication of electronic and photonic devices. This study reports the electrical properties of the ZnO nanostructure grown on the plasma surface pre-treated plastic substrates. The ZnO films were grown by using solution method with zinc nitrate hexahydrate Zn(NO3)2•6H2O and hexamethylenetetramine C12H6N4.as the main solution under various deposition conditions. The films with plasma surface pre-treatment has stronger (100) peak intensity than that without plasma surface pre-treatment. Also, very uniform grain size of the ZnO nanostructures can be seen. The fabricated enhancement mode ZnO thin film transistors (TFTs) exhibiting good transistor behavior with the drain saturation current of 38.1 µA at VGS = 35 V can be achieved. Keywords: ZnO nanostructure, plastic substrate, solution method, plasma, surface pre-treatment, TFT.