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Gas supply member, the method of forming the plasma processing apparatus and yttria-containing film
Gas supply member, the method of forming the plasma processing apparatus and yttria-containing film
2011
eiyuu etou
satiyo itou
ri kyuu ikariyama
makoto saitou
Keywords:
Yttria-stabilized zirconia
Plasma processing
Materials science
Chromatography
Analytical chemistry
Chemical engineering
gas supply
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