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MOVPE Growth of AlN on Annealed Sputtered AlN Templates with Nano Pattern
MOVPE Growth of AlN on Annealed Sputtered AlN Templates with Nano Pattern
2020
Yukino Iba
Kanako Shojiki
Shigeyuki Kuboya
Kenjiro Uesugi
Shiyu Xiao
Hideto Miyake
Keywords:
Nano-
Nanotechnology
Template
Materials science
Metalorganic vapour phase epitaxy
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