Formation of CN Bonds in the Amorphous Carbon Filmby N-Implantation

N-implantation into amorphous carbon films with different doses was carried out to study the formation of CN bonding. Raman and XPS spectra were used to characterize the chemical bonding of CN bonds in amorphous carbon films after N-implantation. The results show that N atoms implanted into amorphous carbon films are bound to C atoms by different bonding types of sp 3 CN, sp 2 CN and C≡N in the films. When N-implantation dose increases, the relative content of sp 3 CN bonds increases, which is more than those of other types of CN bonds in the films. It indicates that N-implantation is favorable to the formation of sp 3 CN bonds.