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Thermal Rounding Kinetics and Demonstration of Steep and Flat Facets Succession in Selective Si-Based Epitaxy
Thermal Rounding Kinetics and Demonstration of Steep and Flat Facets Succession in Selective Si-Based Epitaxy
2016
Victorien Paredes-Saez
Didier Dutartre
G. Bremond
Keywords:
Thermal
Ecological succession
Epitaxy
Rounding
Kinetics
Optics
Materials science
Engineering physics
Correction
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