Composite depositing method for high temperature anti-oxidation coatings

The invention discloses a composite depositing method for high temperature anti-oxidation coatings. The composite depositing method comprises the following steps: (1) placing a base of a coating which needs to be deposited in a reaction chamber and vacuumizing the reaction chamber; (2) heating the base by utilizing a heating device and keeping a corresponding heating temperature; (3) depositing a desired high temperature anti-oxidation layer on the base by utilizing an atomic layer deposition technique; (4) depositing a high temperature anti-oxidation layer of which the material is the same as that of the high temperature anti-oxidation layer in the step (3) by utilizing a chemical vapor deposition technique; and (5) repeating the step (3) to the step (4) until the thickness of the high temperature anti-oxidation layer meets the requirements. According to the composite depositing method for the high temperature anti-oxidation coatings disclosed by the invention, the high compactness of the atomic layer depositing coating is utilized, so that the defects flaws, micro pores and the like in chemical vapor deposition thin films are overcome, and the inheritance and the development of various defects are prevented, so that the coatings have a good anti-oxidation property, and besides, the deposition time can also be within a realizable and reasonable scope.