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Micropatterning of inorganic film by laser-induced pyrolysis using organometallic precursor
Micropatterning of inorganic film by laser-induced pyrolysis using organometallic precursor
2004
Akira Watanabe
Tomokazu Tanase
Yoshio Kobayashi
Mikio Konno
Shinji Yamada
Takao Miwa
Keywords:
Micropatterning
Chemical engineering
Pyrolysis
Laser
Materials science
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