Study of CVD diamond C(100) by X-ray absorption spectroscopies

Surface sensitive x-ray absorption fine structure measurements were carried out near the carbon K-edge on chemical vapor deposited (CVD) diamond and natural diamond. Utilizing different methods, namely near edge and extended x-ray absorption fine structure measurements (NEXAFS and EXAFS), features were found in the spectra which were attributed to non-diamond coordination fractions, such as bulk C-H bonds, graphite-like and more diamond-like coordinated amorphous carbon domains. Both techniques show that the non-diamond fractions consist mainly of diamond-like amorphous carbon.