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Experimental measurement of the plasma parameters in Ar/SF$_{6}$ inductively coupled plasma
Experimental measurement of the plasma parameters in Ar/SF$_{6}$ inductively coupled plasma
2010
Seung-Ju Oh
Hyo-Chang Lee
Young-Kwang Lee
Jung Kyu Lee
Chin-Wook Chung
Keywords:
Plasma parameters
Analytical chemistry
Inductively coupled plasma
Chemistry
Materials science
Correction
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