A Type of Two-Photon Microfabrication System and Experimentations

After the femtosecond laser was invented, two-photon microfabrication technology has been recognized as an important method to fabricate the nanostructure and microstructure. In this paper, the two-photon microfabrication system is described, and some experiments are done. From the experiment results, it can be seen that the resolution of the two-photon microfabrication system can be improved by the expose time, the laser power, and the diffractive superresolution element (DSE). Finally, some three-dimensional (3D) microstructure models are fabricated to show the potential of the two-photon microfabrication method.