Aberration corrected 1.2-MV cold field-emission transmission electron microscope with a sub-50-pm resolution
2015
Atomic-resolution electromagnetic field observation is critical to the development of advanced materials and to the unveiling of their fundamental physics. For this purpose, a spherical-aberration corrected 1.2-MV cold field-emission transmission electron microscope has been developed. The microscope has the following superior properties: stabilized accelerating voltage, minimized electrical and mechanical fluctuation, and coherent electron emission. These properties have enabled to obtain 43-pm information transfer. On the bases of these performances, a 43-pm resolution has been obtained by correcting lens aberrations up to the third order. Observations of GaN [411] thin crystal showed a projected atomic locations with a separation of 44 pm.
Keywords:
- Conventional transmission electron microscope
- Optics
- Scanning transmission electron microscopy
- Contrast transfer function
- High-resolution transmission electron microscopy
- Analytical chemistry
- Transmission electron microscopy
- Electron beam-induced deposition
- Microscope
- Electron microscope
- Physics
- Field electron emission
- Correction
- Source
- Cite
- Save
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