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Characterizing Texture and Grain Boundaries in Nanoscale Cu Interconnects by Precession Electron Diffraction
Characterizing Texture and Grain Boundaries in Nanoscale Cu Interconnects by Precession Electron Diffraction
2011
K. J. Ganesh
Amith Darbal
S. Rajasekhara
Gregory S. Rohrer
K. Barmak
Paulo J. Ferreira
Keywords:
Precession electron diffraction
Nanoscopic scale
Electron diffraction
Materials science
Crystallography
Electron backscatter diffraction
Reflection high-energy electron diffraction
Grain boundary
Analytical chemistry
Condensed matter physics
Correction
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