The Leipzig high-energy ion nanoprobe: A report on first results

Abstract The high-energy ion nanoprobe LIPSION at the University of Leipzig has been operational since October 1998. Its magnetic quadrupole lens system, arranged as a separated Russian quadruplet, has been developed by the Microanalytical Research Centre (MARC), Melbourne. The ultrastable single-ended 3.5 MV SINGLETRON™ accelerator (High Voltage Engineering Europa) supplies H + and He + ion beams with a beam brightness in the range of 10–20 A rad −2 m −2 eV −1 [D.J.W. Mous, R.G. Haitsma, T. Butz, R.-H. Flagmeyer, D. Lehmann, J. Vogt, Nucl. Instr. and Meth. B 130 (1997) 31]. Due to this high brightness, the excellent optical properties of the focusing system of the nanoprobe and the suppression of mechanical vibrations, lateral resolutions of 100 nm for the low current mode (STIM) and 340 nm at a current of 10 pA (PIXE, RBS, SEI modes) were achieved. Further improvements are expected.