Multi-axis tactile sensor and method for manufacturing multi-axis tactile sensor

The purpose of the present invention is to increase the sensitivity of pressure (force in the Z-axis direction) detection by a tactile sensor in a multi-axis tactile sensor which uses a beam provided with a piezoresistance layer. A multi-axis tactile sensor comprising: a substrate 1; a sensor chip 2 provided on the substrate 1; shear force detecting elements 6, 7 formed substantially flush with the sensor chip surface; a pressure detecting element 8; an elastic body 4 provided with a bottom face having substantially the same or a smaller surface area than the sensor chip surface 20, the bottom face being bonded on the sensor chip surface 20 so as to cover the shear force detecting elements 6, 7 and the pressure detecting element 8; and an exterior body 5 for covering the sensor chip and the elastic body, the exterior body 5 being formed from a harder material than the elastic body 4.