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Ultrathin Aluminum Oxide Films Induced by Rapid Thermal Annealing for Effective Silicon Surface Passivation
Ultrathin Aluminum Oxide Films Induced by Rapid Thermal Annealing for Effective Silicon Surface Passivation
2021
Jun Chen
Peng Wang
Can Liu
Guoqiang Yu
Tao Wang
Xiaogang Wu
Lingbo Xu
Ping Lin
Xiaoping Wu
Xiaorong Huang
Yi Zhao
Xuegong Yu
Can Cui
Keywords:
Chemical engineering
Silicon
rapid thermal annealing
Activation energy
Passivation
Materials science
Aluminum oxide
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