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Complex Imaging Reflectometry Using Tabletop Coherent EUV Beams for Spatially and Depth-Resolved Imaging
Complex Imaging Reflectometry Using Tabletop Coherent EUV Beams for Spatially and Depth-Resolved Imaging
2021
Yuka Esashi
Michael Tanksalvala
Christina L. Porter
Bin Wang
Nicholas Jenkins
Zhe Zhang
Joshua Knobloch
Brendan McBennett
Naoto Horiguchi
Chen-Ting Liao
Jianwei Miao
Michael Gerrity
Henry C. Kapteyn
Margaret M. Murnane
Keywords:
Optics
Reflectometry
Extreme ultraviolet lithography
Materials science
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