Effects of OH Radicals on Formation of Cu Oxide and Polishing Performance in Cu Chemical Mechanical Polishing

The amount of OH radicals generated varied according to the complexing agent or Cu ion, and the accelerating effect of OH radicals on the rate of Cu oxide formation was found in acidic pH. When Cu(I) ions and oxalic acid were added to H 2 O 2 -based slurry, the decreases in etch and removal rates of Cu were observed because more generation of OH radicals resulted in the formation of thicker Cu oxide compared to additive-free slurry. Therefore, proper control of the formation and dissolution of Cu oxide led to an increase in etch and removal rates.