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Epitaxial Growth and Applications of Low-Resistivity Phosphorous-Doped Si1-xCx
Epitaxial Growth and Applications of Low-Resistivity Phosphorous-Doped Si1-xCx
2012
Thomas N. Adam
Nicolas Loubet
Alexander Reznicek
Vamsi Paruchuri
Ron Sampson
Devendra K. Sadana
Keywords:
Epitaxy
Doping
Electrical resistivity and conductivity
Inorganic chemistry
Materials science
Optoelectronics
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