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Al 2 O 3 barrier film growth at room temperature by ALD with active species from high purity ozone gas
Al 2 O 3 barrier film growth at room temperature by ALD with active species from high purity ozone gas
2019
Naoto Kameda
Miura Toshinori
Yoshiki Morikawa
Mitsuru Kekura
Ken Nakamura
Hidehiko Nonaka
Keywords:
Chemical engineering
Ozone
Materials science
Correction
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