A new approach to mesh generation for complex 3D semiconductor device structures

A new approach to mesh generation for general 3D domain is proposed. A prototype mesh generator which utilizes octree for easy manipulation of 3D structures, is developed. It shows that "well-fitted" tetrahedral mesh can be constructed assuming that an appropriate triangular mesh upon the boundary is given. There is a good chance that adaptive meshing and moving boundary will be managed well in this mesh generation method.