A low voltage and large stroke Lorentz force continuous deformable polymer mirror for wavefront control

Abstract This paper presents a low voltage, and large stroke Lorentz-force actuated continuous deformable polymer mirror for adaptive optics. A 5 × 5 actuator array clamped on the rigid mounting rail are formed from single crystal silicon flexible serpentine springs on either side of a rigid crossbar containing a narrow contact pillar. For the mirror, an epoxy-based SU-8 photoresist is used, which enables low voltage operation combined with Lorentz actuator. The Lorentz DM were tested and demonstrated a large 40 μm deformation at 9 mA actuation current, and needing