CMOS compatible photodetectors for optical interconnects

In this paper we describe the design and testing of a high speed photodetector that is fully integrated into a CMOS chip, with a response time of 2.6 ns and an operating speed of 112 MHz. The photodetector is to be used in an optically interconnected multi-chip module.© (1993) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.