Robustness and reliability achievements for direct hybrid bonding integration: a review

S Moreau,J. Jourdon,Sandrine Lhostis,D. Bouchu,Y. Henrion,Lucile Arnaud,A Jouve,Viorel Balan,F. Fournel,P. Lamontagne,S. Cheramy,L. Di Cioccio

Robustness and reliability achievements for direct hybrid bonding integration: a review

2019

S Moreau
J. Jourdon
Sandrine Lhostis
D. Bouchu
Y. Henrion
Lucile Arnaud
A Jouve
Viorel Balan
F. Fournel
P. Lamontagne
S. Cheramy
L. Di Cioccio

The paper reviews the robustness/reliability achievements and include previously published data related to the hybrid bonding module for W2W and D2W bonding techniques.

Keywords:

Robustness (computer science)
Reliability engineering
Computer science

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